Behringer

ADVANCED ENERGY AE APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYO

Description: AE ADVANCED ENERGY APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYO ETCH 1.5kW 13.56MHz 374V POWER-DELIVERY SYSTEM Product SpecificationsAdvanced Energy Apex® RF Power-Delivery Systems The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing. The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing. Features:Streamlined designOn-board chamber mount, on-tool frame mount, rack mount, and shoebox optionsWideband control loops and optional, high repetition-rate pulsingIndustry-leading arc managementRegulatory compliantBenefits:Higher power densityImproved process flexibilityIncreased yieldLower CoOSimplified process tool integrationFlexible communications Unit SpecificationsMake: Advanced Energy (AE)Model: Apex 1513AE Part No.: 3156110-114LAM Part No.: 660-032596-014Rev: B, F/R: B1.5kW, 13.56MHz, 374VType: RF Generator/ RF Power-Delivery System DescriptionThis unit is used, untested and in good physical condition (with few minor scratches/scuffs from handling). As we do not have the technical expertise to further test the unit, we are selling it on an "AS IS BASIS". ShippingWe ship worldwide. Please email us for a shipping quoteGot a minute? Check out more LAM Research parts and RF related parts/ equipment My Store | Contact Us

Price: 2299 USD

Location: Singapore, none

End Time: 2024-10-16T07:57:30.000Z

Shipping Cost: 0 USD

Product Images

ADVANCED ENERGY AE APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYOADVANCED ENERGY AE APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYOADVANCED ENERGY AE APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYOADVANCED ENERGY AE APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYO

Item Specifics

All returns accepted: ReturnsNotAccepted

Brand: Advanced Energy AE/ LAM Research

Model: Apex 1513/ 3156110-114 B/ 660-032596-014

MPN: Apex 1513/ 3156110-114 B/ 660-032596-014

Type: RF Generator/ RF Power-Delivery System

Recommended

Advanced Energy PDW600 RF Generator 3156014-000 400kHz 600W LAM Research AE PDW
Advanced Energy PDW600 RF Generator 3156014-000 400kHz 600W LAM Research AE PDW

$8900.00

View Details
ADVANCED ENERGY AE APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYO
ADVANCED ENERGY AE APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYO

$2299.00

View Details
AE 2kW APEX 2013 RF Generator Advanced Energy 3156113-024 LAM TCP 660-063437-003
AE 2kW APEX 2013 RF Generator Advanced Energy 3156113-024 LAM TCP 660-063437-003

$3800.00

View Details
LAM RESEARCH 660-063437-003 AE APEX 1513 RF GENERATOR 3156113-024, USED
LAM RESEARCH 660-063437-003 AE APEX 1513 RF GENERATOR 3156113-024, USED

$3500.00

View Details
AE ADVANCED ENERGY PDXII LOGIC BOARD3 23020040-A (As-Is)
AE ADVANCED ENERGY PDXII LOGIC BOARD3 23020040-A (As-Is)

$745.34

View Details
AE ADVANCED ENERGY PDXII PASSIVE DISPLAY2 Board 23020046-A (As-Is)
AE ADVANCED ENERGY PDXII PASSIVE DISPLAY2 Board 23020046-A (As-Is)

$931.68

View Details
Advanced Energy RFDS 1250 RF Generator AE 3155059-026 Lam 660-024637-026
Advanced Energy RFDS 1250 RF Generator AE 3155059-026 Lam 660-024637-026

$19650.00

View Details
LAM RESEARCH APEX 2013 AE RF GENERATOR MPN 660-063437-003,  3156113-024 Rev A
LAM RESEARCH APEX 2013 AE RF GENERATOR MPN 660-063437-003, 3156113-024 Rev A

$800.00

View Details
LAM 660-024637-028 AE ADVANCED ENERGY 3155027-028 RFG1250 HALO, 134897
LAM 660-024637-028 AE ADVANCED ENERGY 3155027-028 RFG1250 HALO, 134897

$29000.00

View Details